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We summarized The existing progress standing from the higher-power DUV laser both equally on the wavelength of FHG of the 1-μm laser and at 193 nm. The recent enhancement in the good-state/fiber laser, and also the nonlinear optical crystals, prompts not simply the typical electric power but will also the beam high quality (coherence) with the DUV lasers to an unprecedented degree.
The standard power from the NIR laser still has the opportunity to become enhanced to tens of watts for instance 70 W [26] In case the double-move configuration can be used for your Yb:YAG SCF amplifier phase. As a result, If your conversion efficiency of 31% from NIR to DUV may very well be nonetheless preserved at this higher electricity ailment, the typical output electric power of the DUV laser at 258 nm could be over twenty W, which would be a impressive ability degree for the DUV laser and result in the unanticipated DUV laser machining benefits. Additionally, for top-electric power DUV laser, the UV harm from the nonlinear crystal, such as the windows for CLBO crystal along with the mirrors, is yet another essential parameter for lasting and steady operation.
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Both equally the 1040 nm and 1078 nm laser come from a single dual-wavelength Yb-doped fiber laser. Every laser is amplified by stages of fiber amplifier and Yb-doped materials amplifier, respectively.
On one other side, the ability scaling from the NIR laser is yet another factor to raise the normal electrical power of your 193-nm DUV laser. As a result of insufficient the significant-ability amplification Option from the NIR laser (as an example at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) might be placed on create a wavelength converter by shifting the wavelength from one μm to the specified wavelength together with obtaining relative increased power [21]. Just lately, a diamond Raman laser confirmed its capability in obtaining a substantial energy plus a significant conversion performance at the 1st Stokes of the one-μm laser [22,23], which suggests the likelihood to get utilized while in the 193-nm DUV laser era thanks to its superior Raman attain and large frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics on the Nd:YAG basic laser wavelength. In order to improve the harm threshold, minimal CLBO surface area roughness, by ultra-precision machining, is necessary. Since the CLBO crystal has effortless hydroscopic reaction and micro scratches in machining, ultra-specific machining on the CLBO crystal can be a challenging technical problem.
Tunable ultraviolet laser supply determined by reliable-condition dye laser technology and CsLiB6O10 harmonic generation
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